HPS-CFL030 / Chromatic Confocal Sensor /  Displacement Sensor / HYPERSEN
HPS-CFL030 / Chromatic Confocal Sensor / Displacement Sensor / HYPERSEN
  • HPS-CFL030 / Chromatic Confocal Sensor /  Displacement Sensor / HYPERSEN

HPS-CFL030

Non-contact displacement sensor with accuracy up to nanometer level

Stable measurement of metal, ceramic, mirror, glass and other materials

Large measuring Angle, suitable for all kinds of working morphologies (deep hole, bevel, camber, etc.)

Fast detection speed

Suitable for high temperature and high pressure operation environment

Technical parameters
Model HPS-CFL030 Reference distance 32.5mm
Measuring range ±4mm Linearity error 2μm
Static repeatability 0.2μm Measuring angle ±13°
Spot diameter (Large) 52μm Spot diameter (Small) 9.36μm
IP protection IP52 (Standard Level),IP67 (Bookable) Environment temperature -40~+85℃
Material Aluminum 6061 Optical fiber length 3m(Standard); 5m/10m(Optional)
Weight 153g Outer diameter 30mm
Application field
  • Step Height Measurement
  • Thickness Measurement
  • Wafer Surface Testing
  • Flatness Measurement
  • Center Pointing
Product size

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